Process for making crack free silicon carbide diffusion components

ABSTRACT

This invention is a process for making crack-free silicon carbide components wherein the level of free silica in the raw batch is controlled.

This is a divisional of application Ser. No. 08/725,717, filed Oct. 4,1996, now U.S. Pat. No. 5,702,991, issued Dec. 30, 1997.

BACKGROUND OF THE INVENTION

The manufacture of semi-conductor devices such as diodes and transistorstypically requires the deposition of dielectric materials such aspolycrystalline silicon, silicon nitride and silicon dioxide on thesurfaces of thin silicon wafers. The thin layer deposition of thesematerials involves rapid heating and cooling cycles in an electricallyheated furnace (or "diffusion process tube") at temperatures typicallyranging from 250° to 1000° C. When dielectric precursor gases are fedinto a diffusion process tube heated to these temperatures, the gasesreact and deposit the dielectric reaction product on the surface of thesilicon wafer.

During the deposition step, the silicon wafers are supported in verticalor horizontal kiln furniture (or "wafer boats") placed within theprocess tube. The wafer boat and process tube are typically made of amaterial which has excellent thermal shock resistance, high mechanicalstrength, an ability to retain its shape through a large number ofheating and cooling cycles, and which does not out-gas (i.e., introduceany undesirable impurities into the atmosphere of the kiln during firingoperations). One material which meets these requirements is siliconcarbide.

When the diffusion component is used in high temperature applications,metallic impurities contained therein often diffuse through the body andcontaminate the silicon wafer. Accordingly, as a general rule, it isdesirable to use as pure a diffusion component as possible, and so rawsilicon carbide powders are generally purified to reduce the contaminantlevels therein. However, in many relatively low temperature applicationswherein the danger of metallic diffusion and contamination is not sogreat, a less pure diffusion component can be used. In one method ofmaking these diffusion components, a slurry comprising a bimodal blendof untreated silicon carbide powders is slip cast to form a green body,and the green body is fired above about 1900° C. to promoterecrystallization. Although use of low purity powders in this processdramatically lowers the cost of making silicon carbide diffusioncomponents for these applications, it has been found that manycomponents so made crack during recrystallization. Since these cracksrender the component essentially useless, the cost of supplying lesspure diffusion components increases.

SUMMARY OF THE INVENTION

In accordance with the present invention, there is provided a method forproducing a crack-free sintered silicon carbide body, comprising thesteps of:

a) providing a raw powder batch comprising:

i) at least 40 weight percent ("w/o") fine grain fraction having aparticle size of less than 10 microns, the fine grain fractioncomprising silicon carbide and at least 0.10 w/o free carbon, the freecarbon having a surface area of at least 10 m² /g,

ii) at least 40 w/o coarse grain fraction having a particle size of atleast 30 microns, the coarse grain fraction comprising silicon carbideand at least 0.1 w/o free carbon,

the raw batch having a total silicon carbide content of at least 96 w/o,

the raw batch having a total silica content of at least 0.5 w/o,

b) forming the raw batch into a green body (preferably by slip casting),and

c) recrystallizing the green body to provide a recrystallized siliconcarbide body having a density of between 2.0 g/cc and 2.8 g/cc(preferably between 2.60 g/cc and 2.75 g/cc).

Also in accordance with the present invention, there is provided amethod for producing a crack-free sintered silicon carbide body,comprising the steps of:

a) providing a raw powder batch comprising:

i) at least 40 weight percent ("w/o") fine grain fraction having aparticle size of less than 10 microns, the fine grain fractioncomprising silicon carbide,

ii) at least 40 w/o coarse grain fraction having a particle size of atleast 30 microns, the coarse grain fraction comprising silicon carbideand less than 0.10 w/o free carbon,

the raw batch having a total silicon carbide content of at least 96 w/o,

the raw batch having a total silica content of at least 0.5 w/o,

b) forming the raw batch into a green body (preferably by slip casting),and

c) recrystallizing the green body to provide a recrystallized siliconcarbide body having a density of between 2.0 g/cc and 2.8 g/cc(preferably between 2.6 and 2.75 g/cc).

Also in accordance with the present invention, there is provided amethod for producing a crack-free sintered silicon carbide body,comprising the steps of:

a) providing a raw powder batch comprising:

i) at least 40 w/o fine grain fraction having a particle size of lessthan 10 microns, the fine grain fraction comprising silicon carbide andfrom 0.10 w/o to less than 0.5 w/o silica, and

ii) at least 40 w/o coarse grain fraction having a particle size of atleast 30 microns, the coarse grain fraction comprising silicon carbide,at least 0.1 w/o free carbon, and at least 0.10 w/o silica,

the raw batch having a total silicon carbide content of at least 96 w/o,

the raw batch having a total silica content of less than 0.5 w/o,

b) forming the raw batch into a green body (preferably by slip casting),and

c) recrystallizing the green body to provide a recrystallized siliconcarbide body having a density of between 2.0 g/cc and 2.8 g/cc(preferably between 2.60 and 2.75 g/cc).

DETAILED DESCRIPTION OF THE INVENTION

Three approaches of solving the problem of cracking duringrecrystallization in bimodal silicon carbide blends have been found. Inthe first method, fine carbon is added to the raw batch. In the secondmethod, the amount of coarse free carbon is controlled. In the third,the silica content of the raw batch is controlled by essentiallycontrolling the silica content of the fines.

It is believed that carbon-containing inclusions which are typicallypresent in coarse silicon carbide feed play a significant role in thecracking phenomenon. Conventional coarse silicon carbide feed contains0.1 w/o to 0.5 w/o free carbon as impurity. During firing, the silicapresent on the surfaces of both the fine and coarse SiC fractionsundergoes a carbothermal reduction in the temperature range of about1450° C. to 1650° C. to form SiO gas. The SiO gas then reacts with thecoarse carbon-containing inclusions and at least partially converts theinclusions to silicon carbide while forming CO as a by-product. Sincethe molar volume of SiC is larger than that of carbon, the conversionfrom C to SiC also produces a large solid volume expansion which cancause stresses. These stresses may be relieved by cracking.

Moreover, examination of the cracked recrystallized bodies produced byconventional slip cast processing of bimodal silicon carbide powdersrevealed cracks generally running parallel to the casting direction.Without wishing to be tied to a theory, it is believed the large breadthof the bimodal silicon carbide particle size distribution leads tosignificant particle segregation during casting. This segregation leadsto localized low density regions of coarse particles which packrelatively poorly in the green body and bond together only weakly duringrecrystallization. Therefore, it is believed the cracks caused by thecarbon inclusion reaction with SiO gas run through these weakly bondedplanes.

Accordingly, the three solutions outlined above can be explained asfollows. In the first approach, wherein fine carbon is added to the rawbatch, the high surface area of the added carbon causes it topreferentially react with the SiO gas, thus preventing reaction betweenthe large carbon-containing inclusions and the SiO gas and theassociated harmful volume expansion of C to SiC. The criticality ofadding at least 0.10 w/o fine carbon to the conventional raw batch toachieve this effect is best shown in Examples 10, 14 and 15 below. Theadvantage of practicing this embodiment is that it allows the use of rawsilicon carbide powders which do not need to be treated to remove silicaor free carbon.

The fine carbon of the first embodiment preferably has a surface area ofbetween 10 m² /g and 200 m² /g (preferably between 50 m² /g and 200 m²/g), and is typically added in an amount of about 0.10 w/o to about 5w/o of the raw batch, preferably between 0.1 w/o and 0.75 w/o.

It was also found that the fine carbon additions of the first approachproduces a smaller pore size distribution in the recrystallized body(i.e., the median pore size, as measured by mercury porosimetry,decreased from about 4 microns to less than 1 micron). The smaller poresizes are believed to be due to effective deoxidization of the silica onthe surface of the silicon carbide grains by the fine carbon, therebylessening the driving force towards grain coarsening.

In the second approach, wherein coarse carbon-containing inclusions inthe raw batch are controlled, the frequency of these inclusions, andhence the regions stressed by the volume expansion of C to SiC isreduced. The criticality of limiting the coarse free carbon content toless than 0.1 w/o of the coarse fraction to achieve this effect is bestshown in Examples 8,11,12,15 and 16 below. The advantage of practicingthis embodiment is that it can be practiced by simply calcining aconventional coarse silicon carbide powder (which typically has 0.1 to0.25 w/o free carbon) in order to lower its free carbon level to below0.1 w/o.

Preferably, the coarse fraction of the second embodiment comprises nomore than 0.06 w/o free carbon, more preferably no more than 0.02 w/o,more preferably less than 0.01 w/o. Coarse silicon carbide powdershaving higher amounts of free carbon can be subjected to conventionalcalcination in order to suitably lower their level of free carbon toless than 0.1 w/o.

The finding that limiting coarse carbon-containing inclusions canprevent cracking is somewhat suprising in that the conventional art hasgenerally considered carbon additions to be beneficial in making siliconcarbide bodies. For example, U.S. Pat. No. 4,771,021 discloses theaddition of fine carbon particles in making of a siliconized siliconcarbide component. U.S. Pat. No. 4,957,811 discloses the use of 0.1-500micron carbon particles in making a siliconized silicon carbide body.U.S. Pat. No. 4,536,449 describes a siliconized silicon carbidecomposite made by incorporating graphite particles on the order of 75 to300 microns. U.S. Pat. No. 5,486,496 describe a sintered silicon carbidebody having graphite inclusions of at least 100 microns. Jacobson, J.Am. Cer. Soc. 75 6! 1603-11 (1992) studied the reaction of siliconcarbide and silicon oxide in the presence of free carbon grains up to 50microns in size, and concluded that the additional free carbon must beadded in the early stages of the sintering reaction in order to formadditional CO and SiC.

In the third approach, wherein the silica content of the green body iscontrolled, the critical silica reactant which initiates the abovereactions is substantially reduced. The criticality of maintaining thesilica content below 0.5 w/o of the total raw batch is best shown inExamples 1,2 and 5. The advantage of this embodiment is that ittypically requires acidic or basic treatment of only the fine fractionin order to lower the total silica content of the raw batch beneath the0.5 w/o critical level.

Typical untreated fine silicon carbide feed has about 1.6 w/o to 2.0 w/osilica, whereas typical untreated coarse silicon carbide feed has onlyabout 0.4 w/o silica. Similarly, typical treated fine silicon carbidefeed has less than 0.5 w/o silica (typically about 0.4 w/o), whiletypical treated coarse silicon carbide feed has about 0.01 w/o silicaThe reason for the higher silica level in the fine fraction is thatsilica is present on silicon carbide grain as a surface phenomenon, andfine grains have a higher specific surface area than coarse grains. Whensubstantially equal amounts of untreated fine and untreated coarse SiCgrains are used (which produces a raw batch having about 1.0-1.2 w/osilica), about 80-85% of the silica resides in the fine fraction.Treating solely the fine fraction effectively reduces the silica contentthereof to about 0.4 w/o, so that the overall silica content of a rawbatch comprising treated fine and untreated coarse silicon carbide feedis about 0.4 w/o.

The raw batch used in the present invention typically comprises between40 and 60 w/o (preferably, between 45 w/o and 55 w/o) fine grains havinga grain size of less than 10 microns. Preferably, at least 80 w/o of thefine fraction has a particle size of between 0.4 and 8 um. Morepreferably, the median particle size is between 1 and 4 um, mostpreferably between 2 and 3 um.

The raw batch also typically comprises between 40 and 60 w/o(preferably, between 45 w/o and 55 w/o) coarse grains having a particlesize of more than 30 microns. Preferably, at least 80 w/o of the coarsefraction has a particle size of between 65 um and 150 um.

Preferably, the raw batch of the present invention consists essentiallyof silicon carbide grains with impurity levels of free carbon andsilica. In some embodiments, at least 96 w/o (and preferably at least 98w/o) of the fine fraction is silicon carbide. In the first twoembodiments, between about 1.0 w/o and 3 w/o (and more typically between1.5 w/o and 2.5 w/o) of the fine fraction is typically silica. In thethird embodiment, between about 0.10 w/o and 0.4 w/o of the finefraction is typically silica. Similarly, at least 96 w/o (preferably atleast 98 w/o) of the coarse fraction is silicon carbide. In the firsttwo embodiments, between about 0.01 w/o and 0.3 w/o of the coarsefraction is typically silica. In the third embodiment, from about 0.10w/o to less than 0.5 w/o of the coarse fraction is typically silica.

Preferably, the raw batch is mixed by a liquid carrier to make a slip.The liquid carrier is preferably deionized water, and generallycomprises about 12 to 16 w/o of the solids. Conventional deflocculationadditives may also be used in appropriate amounts.

Preferably, the slip is dewatered by pouring the slip into a plaster ofparis mold and allowing the slip to cast against the face of the mold .The resulting green body typically has a bulk density of between about2.60 g/cc and 2.75 g/cc and a four point bending strength of at least500 psi. Its pore sizes range from 0.1 to 0.5 microns, with a medianpore size of about 0.2 um.

Preferably, the green body is recrystallized in a cycle including a 1hour soak at about 1700° C. to 2000° C. under an argon atmosphere ofabout 600 mlllitorr. Preferably, the soak is undertaken in the 1800° C.to 2000° C. temperature range, more preferably in the 1900° C. to 2000°C. temperature range. Typical dry shrinkage is between about 0.02% and0.1% (more typically between 0.04 and 0.07%), thereby yielding a firedSiC body having a density of between 2.0 g/cc and 2.8 g/cc, typically2.6 g/cc and 2.75 g/cc when slip casting is used. The resultinguncracked recrystallized body has a room temperature 4 point flexuralstrength of at least 100 MPa (typically between 140 MPa and 170 MPa),and a 1350° C. four-point flexural strength in argon of at least 100 MPa(typically between 120 MPa and 170 MPa). Its average pore size istypically between 0.5 and 6 um.

EXAMPLES

For each of the examples set out below, unless otherwise specified, thefollowing standard procedure was followed. A silicon carbide mixturecomprising 52 w/o fine silicon carbide having a mean particle size ofbetween 2 and 3 microns, and 48 w/o coarse silicon carbide having aparticle size of between 30 and 150 microns was used. The fine siliconcarbide had a silica content of 1.2 to 2.0 w/o and a free carbon contentabout 0.3 w/o to 0.5 w/o, while the coarse silicon carbide had a silicacontent of about 0.3-0.5 w/o and a free carbon content ranging from 0.13to 0.24 w/o. This mixture was mixed with about 12 w/o to 16 w/o water,about 0.25 to 1.0 w/o acrylic binder, and an appropriate amount ofdeflocculating agent to form a slip. The slip was then poured into aplaster of paris mold and dewatered to produce a green body having theshape of a part of a diffusion component.

The green body was fired in a sintering cycle which included a 3°C./minute ramp to about 1940° C. for 1 hour in an argon atmospherehaving a 600 millitorr vacuum.

EXAMPLE 1

This Example evaluated the effect of using raw powders having differentsilica contents and different particle sizes. One sintered body was madein substantial accordance with the standard procedure and sinteredcracking was displayed. When the standard fine fraction was replacedwith a more pure fine fraction having a silica content of only 0.4 w/o(thereby reducing the total silica content from about 1 w/o to about 0.4w/o), cracking was eliminated. In another trial, the standard coarsegrain was replaced with a more pure coarse fraction having a silicacontent of only 0.01 w/o (thereby reducing the total silica content fromabout 1 w/o to about 0.8 w/o), but cracking was not eliminated. Inanother trial, each standard fraction was replaced with the more pure(i.e., less silica) corresponding fraction (thereby reducing the totalsilica content from about 1 w/o to about 0.2 w/o) and cracking waseliminated. The results of these studies indicate the silica content ofthe green body (which appears mainly in the fine fraction) contributesto the cracking problem.

Concurrently, a sintered body was made in substantial accordance withthe standard procedure, except that the fine fraction constituted 100%of the silicon carbide. The resulting bodies displayed no cracking. Thisresult indicates the bimodal nature of the particle size distribution ofthe raw batch contributes to the cracking phenomenon.

EXAMPLE 2

This Example studied the effect of intentionally doping the raw batchwith silica. Sintered bodies were made in substantial accordance withthe standard procedure, except that both the fine and coarse fractionswere replaced with the high purity fractions set out in Example 1, andthe high purity fine fraction was then calcined in order to raise itssilica content from about 0.4 w/o to about 1.2 w/o (thereby raising thetotal silica content of the green body from about 0.2 w/o to about 0.6w/o). The resulting sintered bodies displayed significant cracking.These results show that a total silica content of above 0.6 w/o in theraw batch leads to increased cracking in the fired body. Together withthe results of Example 1, a critical level of about 0.5 w/o total silicais revealed.

EXAMPLE 3

This example studied the effect of narrowing the breath of the bimodalparticle size distribution of the silicon carbide powder. Sinteredbodies were made in substantial accordance with the standard procedure,except that the coarse fraction was gradually replaced with an F240fraction characterized by a free carbon content of 0.06 w/o and a medianparticle size of about 40 um. The resulting sintered bodies showeddecreased cracking frequency with increasing substitution, with nocracks appearing when the coarse fraction had at least 70% of thesubstituted F240 powder. However, when this F240 fraction was replacedwith another F240 fraction having a free carbon content of about 0.08w/o, the fired bodies displayed cracking. These results show that simplynarrowing the particle size distribution of the bimodal mix does notsolve the cracking problem. They also suggest that reducing the freecarbon level in the standard coarse grain (which is about 0.12-0.24 w/oof the coarse fraction) by about 70% provides a critical level of freecarbon (about 0.04 to about 0.07 w/o) below which cracking isessentially prevented.

EXAMPLE 4

This Example studied the effect of reducing the median particle size ofthe coarse grain fraction. Sintered bodies were made in substantialaccordance with the standard procedure, except that the coarse fractionwas screened to remove larger particles and this reduced the medianparticle size by about 10%. However, the resulting sintered bodiesshowed cracking. This result again indicates the insufficiency ofaltering the particle size distribution of the coarse fraction to reducecracking.

EXAMPLE 5

This example also studied the effect of intentionally doping the rawbatch with silica, as in Example 2. Sintered bodies were made insubstantial accordance with the standard procedure, except that both thefine and coarse fractions were replaced with the high purity fractionsset out in Example 1, and 1 w/o, 3 w/o and 5 w/o fine silica was addedto the raw batch in order to raise its total silica content from about0.2 w/o to about 1.2 w/o, 3.2 w/o and 5.2 w/o, respectively. Theresulting sintered bodies displayed significant cracking. These resultsshow that increasing the total silica content in the raw batch from 0.2w/o to at least 1.2 w/o leads to increased cracking in the sinteredbody.

In separate studies, fine silica was added to a raw batch containing100% fine SiC powder. Cracking was not observed. This finding furtherindicates the bimodal nature of the particle size distribution plays akey role in the cracking phenomenon.

EXAMPLE 6

This Example studied the effect of increasing the percentage of the finesilicon carbide fraction in the raw batch. Sintered bodies were made insubstantial accordance with the standard procedure, except that the finefraction was increased from 52 w/o to up to 58 w/o. The resultingsintered bodies showed about as much cracking as bodies produced inaccordance with the standard procedure. These results show thatsignificant increases in the fines content does not alleviate theparticle segregation phenomenon to the extent needed to prevent firedcracking.

EXAMPLE 7

Modified sintering cycles were evaluated as a means of controlling thevaporization kinetics associated with the carbothermal reduction ofsilica. In particular, intermediate hold segments, reduced ramp rates,and changes to the argon atmosphere were evaluated. These modificationsdemonstrated no effect on controlling the severity of cracking.

EXAMPLE 8

Physical and chemical characterization of selected coarse fractionsknown to produce sintered cracking was undertaken, and the results werecompared with similar characterizations of other coarse fractions knownto have produced uncracked components. The characterization includedparticle shape analysis, purity analysis, phase composition analysis andthermal activation analysis. The results of this comparison revealedthat the only difference between these two groups of coarse fractionswas in their free carbon levels. In particular, the coarse fractionsassociated with cracking showed a higher free carbon level than thoseassociated with no cracking.

EXAMPLE 9

This Example studied the effects of lowering the average particle sizein the fine fraction. Since it is known that improved green strengthcould be expected to improve the green body's crack resistance duringfiring, the green strength of the green body was enhanced by replacingthe standard fine grain (which has an average particle size of about 2-3microns) with an even finer grain (which had a submicron particle size.The bodies having the finer particle size did not exhibit an decreasedfrequency of cracking.

EXAMPLE 10

This example studied the effects of fine carbon additions. Fine carbonhaving a size range of between 10 m² /g and 200 m² /g was added inamounts of about 0.1 w/o to about 0.75 w/o of the raw batch of standardfine and coarse grains. The resulting sintered bodies in each case weretotally devoid of cracks.

EXAMPLE 11

This Example examined controlling the free carbon level in both the fineand coarse grain fractions. To this end, coarse grains having a freecarbon content of about 0.24 w/o were made into a bed having a 3 inch (8cm) bed and were calcined at 600° C. for two hours in air. Fine grainshaving a free carbon content of about 0.3 w/o were similarly calcined.The coarse calcined grains were found to have a free carbon content ofonly about 0.06 w/o, and the fine calcined grains had a free carboncontent of less than 0.05 w/o. Firing the fine calcined grains withstandard coarse grains did not show any improvement in cracking.However, when the calcined coarse grains were used with standard finegrains, the resulting sintered bodies were free of cracks. Thesubstantial absence of coarse carbon-containing inclusions is believedto be the principal reason for the desirable results obtained by the rawbatch having the calcined coarse fraction.

EXAMPLE 12

Components were sintered with various combinations of two commerciallyavailable fine silicon carbide powders A and B, and two commerciallyavailable coarse silicon carbide powders C and D. The results revealedthat each combination using coarse powder D showed cracking, while eachcombination using coarse powder C showed no cracking. Physical andchemical characterization of two coarse fractions C and D wasundertaken, including particle shape analysis, purity analysis, phasecomposition analysis, and thermal activation analysis. The results ofthis characterization showed the only difference to be the free carbonlevel. In particular, the coarse powder D (which produced cracking)showed a higher free carbon level (about 0.20 w/o) than coarse powder C(which produced no cracking and had a free carbon level of about 0.02w/o). This finding is consistent with that shown in Example 8.

EXAMPLE 13

This Example studies the effects of sedimentation upon free carbon.Coarse fractions known to produce cracking were subjected tosedimentation, wherein the powder is floated on water, and the densitydifference between the carbon and silicon carbide particles is used toseparate the carbon from the silicon carbide. However, it was found thatthe powders resulting from the sedimentation did not lower the crackingfrequency.

EXAMPLE 14

This example studied the effects of the type of fine carbon added to theraw batch. In particular, both carbon black and colloidal carbon wereadded to raw batches in a manner substantially similar to that ofExample 10. The results indicated that colloidal carbon additions beganto eliminate cracking at additive levels of only 0.2 w/o, while carbonblack began to eliminate cracking levels at 0.5 w/o. Thus, colloidalcarbon was much more effective in eliminating cracks than was carbonblack.

EXAMPLE 15

This Example evaluated the fired microstructure at various stages of thesintering cycle. Since previous dilatometer studies indicated a drasticvolume increase occurs the range of 1450° C. to 1600° C., themicrostructures of components fired up to 1400° C. and to 1600° C. wasstudied. The components fired up to 1400° C. did not display cracking,but the microstructures of the components using coarse fractions knownto produce cracking were found to contain large (150 micron)carbon-containing inclusions. These inclusions generally contained about20% to about 40% silicon, with the remainder being carbon. When batcheshaving large carbon-containing inclusions in the coarse fraction werefired to 1650° C., the green bodies which had fine carbon addition didnot crack and the carbon-containing inclusions therein were notconverted to SiC, while the components which had no fine carbon additionwere cracked and the carbon-containing inclusions therein were convertedto SiC. Moreover, the cracks in the components having convertedinclusions appeared to originate precisely at the converted inclusions.These inclusions were found to contain about 40% to about 50% silicon,with the remainder being carbon. These results show that the solidvolume expansion caused by conversion of the carbon-containinginclusions to SiC causes a critical stress in the green body which leadsto cracking.

EXAMPLE 16

This example studied green bodies intentionally doped with large carboncontaining inclusions. High purity graphite was ground to 150 um sizeusing a silicon carbide mortar and pestle. Inclusions in the amount of0.01 w/o to 0.2 w/o were added to raw batches comprising coarsefractions known to produce uncracked sintered components without finecarbon addition. In one case wherein the selected coarse fraction (whichhad a free carbon content of about 0.14 w/o) was known to producerelatively little cracking, the dopant enhanced the degree of crackingwith increased dopant concentration. In another case wherein theselected coarse fraction (which had a free carbon content of about 0.06w/o) was known to produce no cracking, the doped batches producedcracking which increased in severity with increased dopantconcentration. Evaluation of the microstructures showed that cracksoriginated from converted inclusions. These results clearly show therole of carbon-containing inclusions in fired cracking.

We claim:
 1. A method for producing a crack-free sintered siliconcarbide body, comprising the steps of:a) providing a raw powder batchcomprising:i) at least 40 w/o fine grain fraction having a particle sizeof less than 10 microns, the fine grain fraction comprising siliconcarbide and from 0.10 w/o to less than 0.5 w/o silica, ii) at least 40w/o coarse grain fraction having a particle size of at least 30 microns,the coarse grain fraction comprising silicon carbide, free carbon, andsilica, and the raw batch having a total silicon carbide content of atleast 96 w/o, the raw batch having a total silica content of less than0.5 w/o, b) forming the raw batch into a green body, and c)recrystallizing the green body to provide a recrystallized siliconcarbide body having a density of between 2.0 g/cc and 2.8 g/cc.
 2. A rawbatch comprising:i) at least 40 w/o fine grain fraction having aparticle size of less than 10 microns, the fine grain fractioncomprising silicon carbide and from 0.10 w/o to less than 0.5 w/osilica, ii) at least 40 w/o coarse grain fraction having a particle sizeof at least 30 microns, the coarse grain fraction comprising siliconcarbide and silica, the raw batch having a total silica content of lessthan 0.5 w/o, the raw batch having a total silicon carbide content of atleast 96 w/o.
 3. The raw batch of claim 2, wherein between about 0.10and 0.5 w/o of the coarse fraction is silica.
 4. The raw batch of claim3, wherein between about 0.10 w/o and 0.4 w/o of the fine fraction issilica.
 5. The method of claim 1 wherein the coarse fraction comprisesat least 0.1 w/o free carbon.
 6. The method of claim 1 wherein thecoarse fraction comprises at least 0.10 w/o silica.
 7. The method ofclaim 1 wherein between 0.10 and 0.5 w/o of the coarse grain fraction issilica.
 8. The method of claim 1 wherein between about 0.1 w/o and 0.4w/o of the fine grain traction is silica.
 9. The method 1 wherein theraw batch comprises between 45 w/o and 55 w/o fine fraction.
 10. Themethod of claim 1 wherein at least 80 w/o of the fine grain fraction hasa particle size of between 0.4 and 8 um.
 11. The method of claim 1wherein the average particle size of the fine grain fraction is between1 and 4 um.
 12. The method of claim 1 wherein the raw batch comprisesbetween 45 w/o and 55 w/o coarse fraction.
 13. The method of claim 1wherein at least 80 w/o of the coarse grain fraction has a particle sizeof between 65 and 150 um.
 14. The method of claim 1 wherein at least 96w/o of the fine grain fraction is silicon carbide.
 15. The raw batch ofclaim 2 wherein the coarse grain fraction comprises at least 0.1 w/ofree carbon.
 16. The raw batch of claim 2 comprising between 45 w/o and55 w/o fine fraction.
 17. The raw batch of claim 2 wherein at least 80w/o of the fine grain fraction has a particle size of between 0.4 and 8um.
 18. The raw batch of claim 2 wherein the average particle size ofthe fine grain fraction is between 1 and 4 um.
 19. The raw batch ofclaim 2 comprising between 45 w/o and 55 w/o coarse fraction.
 20. Theraw batch of claim 2 wherein at least 80 w/o of the coarse grainfraction has a particle size of between 65 and 150 um.
 21. The raw batchof claim 2 wherein at least 96 w/o of the fine grain fraction is siliconcarbide.
 22. The raw batch of claim 2 wherein at least 96 w/o of thecoarse grain fraction is silicon carbide.